Tiruchirapalli N. Arunagiri
Department
of Chemistry
University
of North Texas
PO Box
305070
Denton, TX
76203
Phone/Fax:
(940) 565-4088
tana@unt.edu
OBJECTIVE
A position that requires my research experience in
analytical/materials chemistry including electrochemistry, thin films,
metallization, semiconductor etch chemistry, surface modification,
characterization and analysis.
WORK
STATUS IN THE USA
Available immediately. Employment Authorization
Document (EAD) issued by the INS. National of India.
EDUCATION
Ph.D,
Analytical/Materials Chemistry, University of North Texas, Denton, TX 76203, May
2003. Dissertation Title: “Interfacial Electrochemistry of Metal Nanoparticles
Formation on Diamond and Copper Electroplating on Ruthenium Surface.” Adviser:
Dr. Oliver M-R Chyan. (GPA = 3.82/4.0).
Relevant
courses: Analytical and Interfacial Electrochemistry, Physical and
Chemical Basis of Integrated Circuits Fabrication, Advanced Analytical
Chemistry, Chromatographic Separations.
M. Sc., Chemistry, Indian Institute of Technology, Madras,
India 600 036, 1997.
Thesis Title: "An Infrared Spectroscopic Investigation
of MxC60 (M = W, Mo) Complexes". Adviser: Dr. T.
Pradeep. (CGPA = 7.78/10.0)
B. Sc. Honors, Chemistry, University of Delhi, Delhi, India
110 007, 1992.
SKILLS/TRAINING
Electrochemical Techniques; Metallography; Optical,
Electron, Electrical and X-ray Materials Characterization; Hard/Ultrahigh
Vacuum Techniques -- PVD, Annealing, XPS; Simple Microwave Plasma Systems;
Infrared Spectroscopy; Profilometry; Semiconductor Wet Etching; Familiarity
with statistical analyses.
EXPERIENCE
May 2003 - Current Post-doctoral
associate with Dr. Oliver Chyan, Dept. of Chemistry, University of North Texas,
TX.
* Supervising a group of graduate and undergraduate
students investigating (i) electrochemical formation of the conducting RuOx/Ru
stack structure and its applicability as a potential Cu interconnects diffusion
barrier in sub 0.13 μm IC devices; (ii) surface and interfacial
characterization of Cu/RuOx/Ru stack. (Manuscript under preparation)
* PVD vs. direct seedless copper electroplated on Ru thin films (~ 5 nm) for 65
and 45 nm IC nodes -- surface, interfacial and interdiffusion studies (In press
"Electrochemical Solid State Letters")
* Microstructure evolution investigation of electrodeposited vs. spontaneously
deposited Pd nanoparticles on semiconducting diamond films -- studied by XRD,
SEM and electrocatalysis.
1997-2003
Research Assistant, Dept. of Chemistry, University of
North Texas, TX.
* Supervising a group of graduate and undergraduate students
investigating (i) electrochemical formation of the conducting RuOx/Ru stack
structure and its applicability as a potential Cu interconnects diffusion
barrier in sub 0.13 μm IC devices; (ii) surface and interfacial
characterization of Cu/RuOx/Ru stack. (Manuscript under preparation)
* Investigated (a) Cu electronucleation & growth
mechanism on Ruthenium (Ru), a potential diffusion barrier in sub 0.13 um
generation ICs; (b) wetting behavior of Cu (<400 Å) on Ru upto 800 oC;
(c) Cu/Ru interfacial stability upto 800 oC by XRD and SEM.
(Published in "Journal of the Electrochemical Society"; provisional
patent filing pending).
* Studied a novel process of spontaneously depositing noble
metal particles such as platinum, palladium and gold on boron-doped
polycrystalline diamond thin films grown on silicon wafers. Used SEM/EDX, XRD
and XPS for analyses. (Published in "Chemistry of Materials").
* Studied the feasibility of electrocatalytic oxidation of
formaldehyde on Pt/diamond and Pd/diamond surfaces. (Communicated to Chem.
Mater.).
* Investigated surface modification of B-doped
polycrystalline diamond surfaces using microwave-generated plasmas - oxygen,
hydrogen and nitrogen.
AWARDS
* James J. and Ruth I. Spurlock Scholarship Award for
outstanding research achievement by a graduate student in Chemistry, Dept. of Chemistry,
University of North Texas, Denton, TX - May 2002.
* First place in the Students Research Presentations in the
Graduate Division of the 35th Meeting in Miniature of the American Chemical
Society, University of Dallas, Irving, Texas - April 2002.
* Travel Sponsorship from University of North Texas towards
the 198th National Meeting of the Electrochemical Society, Phoenix, Arizona -
October 2000.
* Robert A. Welch Pre-doctoral Fellowship during Summer
1998, 1999 and Fall 2000 - Fall 2002.
1. Tiruchirapalli Arunagiri, Teresa D. Golden and
Oliver Chyan, “Study of Palladium Nanoparticles Deposition on the Conductive
Diamond Surface by XPS, XRD and Electrochemistry”, Communicated to Chem.
Mater., July 2003.
2. Raymond Chan, Tiruchirapalli N. Arunagiri, Yibin
Zhang, Oliver Chyan, Robert Wallace, Moon Kim and Trace Hurd, “Ruthenium Thin
Film as a Directly Plate-able Copper Diffusion Barrier”, Accepted in
Electrochem. Solid State Lett., June 2003.
3. Oliver Chyan, Tiruchirapalli Arunagiri and Thomas
Ponnuswamy, "Electrodeposition of Copper Thin Film on Ruthenium: a
Potential Diffusion Barrier for Cu Interconnects", J. Electrochem. Soc.,
150 (5), C347-C350, May 2003.
4. Jin-Song Gao, Tiruchirapalli Arunagiri, Jin Jian
Chen, Patrick Goodwill and Oliver Chyan, "Preparation and Characterization
of Metal Nanoparticles on a Diamond Surface", Chem. Mater., 12, 3495-3500
(2000).
5. M. R. Resmi, K. Smitha, T. N. Arunagiri and T.
Pradeep, "Spectroscopic Investigation of M(CO)5-C60 (M = W, Mo) Complexes:
Precursors for Metal Fullerides", Fullerene Sci. Technol., 7(2), 123-146
(1999).
6. Oliver Chyan, Tiruchirapalli Arunagiri, Raymond
Chan, Thomas Ponnuswamy and Trace Hurd, "Study of Copper Electrodeposition
and its Inter-diffusion Properties on Ruthenium Metal Surface", The
Electrochemical Society Meeting, Philadelphia, Pennsylvania - May 2002.
7. T. N. Arunagiri, Thomas Ponnuswamy and Oliver
Chyan, "Electroplating and Interfacial Characterization of Copper on
Ruthenium Metal Surface", American Chemical Society's Meeting in
Miniature, University of Dallas, Irving, Texas - April 2002.
8. Tiruchirapalli Arunagiri, Thomas Ponnuswamy and
Oliver Chyan, "Investigation of Copper Electrodeposition on Ruthenium
Metal Surface", Materials Research Society Meeting, Boston, Massachusetts
- November 2001.
9. T. Arunagiri, J. -S. Gao, J. -J. Chen, P. Goodwill
and Oliver Chyan, "Deposition of Metal Nanoparticles on Diamond Surface
via a Solution Route", The Electrochemical Society Meeting, Phoenix, Arizona
- October 2000.
REFERENCES
Available upon request.